Characterization of SrTiO3-based MIM capacitors grown by using different precursors and growth temperatures

  1. Garcia, H.
  2. Castán, H.
  3. Gomez, A.
  4. Dueñas, S.
  5. Bailón, L.
  6. Kukli, K.
  7. Kariniemi, M.
  8. Kemell, M.
  9. Niinistö, J.
  10. Ritala, M.
  11. Leskelä, M.
Konferenzberichte:
Proceedings of the 8th Spanish Conference on Electron Devices, CDE'2011

ISBN: 9781424478637

Datum der Publikation: 2011

Art: Konferenz-Beitrag

DOI: 10.1109/SCED.2011.5744209 GOOGLE SCHOLAR