Characterization of SrTiO3-based MIM capacitors grown by using different precursors and growth temperatures

  1. Garcia, H.
  2. Castán, H.
  3. Gomez, A.
  4. Dueñas, S.
  5. Bailón, L.
  6. Kukli, K.
  7. Kariniemi, M.
  8. Kemell, M.
  9. Niinistö, J.
  10. Ritala, M.
  11. Leskelä, M.
Actes de conférence:
Proceedings of the 8th Spanish Conference on Electron Devices, CDE'2011

ISBN: 9781424478637

Année de publication: 2011

Type: Communication dans un congrès

DOI: 10.1109/SCED.2011.5744209 GOOGLE SCHOLAR