Influence of precursor chemistry and growth temperature on the electrical properties of SrTiO3 -based metal-insulator-metal capacitors grown by atomic layer deposition
- García, H.
- Castán, H.
- Gómez, A.
- Dueñas, S.
- Bailón, L.
- Kukli, K.
- Kariniemi, M.
- Kemell, M.
- Niinistö, J.
- Ritala, M.
- Leskelä, M.
ISSN: 2166-2754, 2166-2746
Year of publication: 2011
Volume: 29
Issue: 1
Type: Conference paper