Silicon oxide-niobium oxide mixture films and nanolaminates grown by atomic layer deposition from niobium pentaethoxide and hexakis(ethylamino) disilane
- Kukli, K.
- Kemell, M.
- Heikkil, M.J.
- Castán, H.
- Dueñas, S.
- Mizohata, K.
- Ritala, M.
- Leskel, M.
ISSN: 1361-6528, 0957-4484
Year of publication: 2020
Volume: 31
Issue: 19
Type: Article