Silicon oxide-niobium oxide mixture films and nanolaminates grown by atomic layer deposition from niobium pentaethoxide and hexakis(ethylamino) disilane

1. Kukli, K.
2. Kemell, M.
3. Heikkil, M.J.
4. Castán, H.
5. Dueñas, S.
6. Mizohata, K.
7. Ritala, M.
8. Leskel, M.