Atomic layer deposition and characterization of dysprosium-doped zirconium oxide thin films

1. Tamm, A.
2. Kozlova, J.
3. Arroval, T.
4. Aarik, L.
5. Ritslaid, P.
6. García, H.
7. Castán, H.
8. Dueñas, S.
9. Kukli, K.
10. Aarik, J.