Ion implantation and transient enhanced diffusion
- Poate, J.M.
- Eaglesham, D.J.
- Gilmer, G.H.
- Gossmann, H.-J.
- Jaraiz, M.
- Rafferty, C.S.
- Stolk, P.A.
Proceedings:
Technical Digest - International Electron Devices Meeting
ISSN: 0163-1918
Year of publication: 1995
Pages: 77-80
Type: Conference paper