H.
Gilmer George
Publications dans lesquelles il/elle collabore avec H. Gilmer George (29)
2003
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Atomistic Monte Carlo simulations of three-dimensional polycrystalline thin films
Journal of Applied Physics, Vol. 94, Núm. 1, pp. 163-168
2002
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Carbon in silicon: Modeling of diffusion and clustering mechanisms
Journal of Applied Physics, Vol. 92, Núm. 3, pp. 1582-1587
2001
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Atomistic modeling of the effects of dose and implant temperature on dopant diffusion and amorphization in Si
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
2000
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Atomistic modeling of complex silicon processing scenarios
Materials Research Society Symposium - Proceedings
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Kinetic Monte Carlo simulations: An accurate bridge between ab initio calculations and standard process experimental data
Materials Science in Semiconductor Processing, Vol. 3, Núm. 1-2, pp. 59-63
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Simulation of defects and diffusion phenomena in silicon
MRS Bulletin, Vol. 25, Núm. 6, pp. 45-50
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The effect of carbon/self-interstitial clusters on carbon diffusion in silicon modeled by kinetic Monte Carlo simulations
Materials Research Society Symposium - Proceedings, Vol. 610, pp. B7.2.1-B7.2.6
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The effect of carbon/self-interstitial clusters on carbon diffusion in silicon modeled by kinetic Monte Carlo simulations
Materials Research Society Symposium - Proceedings
1999
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Activation and deactivation of implanted B in Si
Applied Physics Letters, Vol. 75, Núm. 5, pp. 662-664
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Atomistic simulations of ion implantation and diffusion
International Conference on Simulation of Semiconductor Processes and Devices, SISPAD
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B cluster formation and dissolution in Si: A scenario based on atomistic modeling
Applied Physics Letters, Vol. 74, Núm. 24, pp. 3657-3659
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Modeling of the effects of dose, dose rate, and implant temperature on transient enhanced diffusion
Applied Physics Letters, Vol. 74, Núm. 14, pp. 2017-2019
1998
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Atomistic modeling of point and extended defects in crystalline materials
Materials Research Society Symposium - Proceedings
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Ion mass influence on transient enhanced diffusion and boron clustering in silicon: Deviation from the "+1" model
Journal of Applied Physics, Vol. 83, Núm. 11, pp. 6182-6184
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Modeling of the ion mass effect on transient enhanced diffusion: Deviation from the "+1" model
Applied Physics Letters, Vol. 73, Núm. 10, pp. 1421-1423
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Monte Carlo atomistic simulation of polycrystalline aluminum deposition
Materials Research Society Symposium - Proceedings
1997
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Atomistic model of transient enhanced diffusion and clustering of boron in silicon
Materials Research Society Symposium - Proceedings
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B diffusion and clustering in ion implanted Si: The role of B cluster precursors
Applied Physics Letters, Vol. 70, Núm. 17, pp. 2285-2287
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Physical mechanisms of transient enhanced dopant diffusion in ion-implanted silicon
Journal of Applied Physics, Vol. 81, Núm. 9, pp. 6031-6050
1996
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Atomic scale simulations of arsenic ion implantation and annealing in silicon
Materials Research Society Symposium - Proceedings