J. D.
Plummer
Publicaciones en las que colabora con J. D. Plummer (3)
2003
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Atomistic modeling of B activation and deactivation for ultra-shallow junction formation
International Conference on Simulation of Semiconductor Processes and Devices, SISPAD
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Atomistic modeling of deactivation and reactivation mechanisms in high-concentration boron profiles
Applied Physics Letters, Vol. 83, Núm. 20, pp. 4166-4168
2002
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A physics based approach to ultra-shallow p+-junction formation at the 32 nm node
Technical Digest - International Electron Devices Meeting