A physics based approach to ultra-shallow p+-junction formation at the 32 nm node

1. Mokhberi, A.
2. Pelaz, L.
3. Aboy, M.
4. Marques, L.
5. Barbolla, J.
6. Paton, E.
7. McCoy, S.
8. Ross, J.
9. Elliott, K.
10. Gelpey, J.
11. Griffin, P.B.
12. Plummer, J.D.