M.
Leskelä
Publicaciones en las que colabora con M. Leskelä (36)
2021
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Analysis of the performance of Nb2O5-doped SiO2-based MIM devices for memory and neural computation applications
Solid-State Electronics, Vol. 186
2020
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Double Swing Quiescent-Current: An Experimental Detection Method of Ferroelectricity in Very Leaky Dielectric Films
ECS Transactions
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Magnetic properties and resistive switching in mixture films and nanolaminates consisting of iron and silicon oxides grown by atomic layer deposition
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 38, Núm. 4
2018
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Atomic layer deposition and properties of HFO 2 -Al 2 O 3 nanolaminates
ECS Journal of Solid State Science and Technology, Vol. 7, Núm. 9, pp. P501-P508
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Admittance memory cycles of Ta2O5-ZrO2-based RRAM devices
2017 32nd Conference on Design of Circuits and Integrated Systems, DCIS 2017 - Proceedings
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Atomic layer deposition and performance of ZrO2-Al2O3 thin films
ECS Journal of Solid State Science and Technology, Vol. 7, Núm. 5, pp. P287-P294
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Atomic layer deposition of zirconium dioxide from zirconium tetraiodide and ozone
ECS Journal of Solid State Science and Technology, Vol. 7, Núm. 2, pp. P1-P8
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Study of the influence of the dielectric composition of Al/Ti/ZrO2:Al2O3/TiN/Si/Al structures on the resistive switching behavior for memory applications
ECS Transactions
2015
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Conduction and stability of holmium titanium oxide thin films grown by atomic layer deposition
Thin Solid Films, Vol. 591, pp. 55-59
2014
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Resistive switching behavior and electrical properties of TiO2:Ho2O3 and HoTiOx Based MIM Capacitors
Materials Research Society Symposium Proceedings
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Single-parameter model for the post-breakdown conduction characteristics of HoTiOx-based MIM capacitors
Microelectronics Reliability
2013
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Influence of growth and annealing temperatures on the electrical properties of Nb2O5-based MIM capacitors
Semiconductor Science and Technology, Vol. 28, Núm. 5
2011
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Characterization of SrTiO3-based MIM capacitors grown by using different precursors and growth temperatures
Proceedings of the 8th Spanish Conference on Electron Devices, CDE'2011
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Influence of precursor chemistry and growth temperature on the electrical properties of SrTiO3 -based metal-insulator-metal capacitors grown by atomic layer deposition
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
2009
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Comparison between the electrical properties of atomic layer deposited thin ZrO2 films processed from cyclopentadienyl precursors
Microelectronic Engineering, Vol. 86, Núm. 7-9, pp. 1689-1691
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Electrical characterization of ZrO2-based MIS structures with highly doped Si substrates
Proceedings of the 2009 Spanish Conference on Electron Devices, CDE'09
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Electrical characterization of high-k based MIS capacitors using flat-band voltage transients
Proceedings of the 2009 Spanish Conference on Electron Devices, CDE'09
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Electrical properties of thin zirconium and hafnium oxide high-k gate dielectrics grown by atomic layer deposition from cyclopentadienyl and ozone precursors
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 27, Núm. 1, pp. 389-393
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Irradiation effect on dielectric properties of hafnium and gadolinium oxide gate dielectrics
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 27, Núm. 1, pp. 416-420
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Study of atomic layer deposited zirconium oxide thin films by using mono-cyclopentadienyl based precursors
Proceedings of the 2009 Spanish Conference on Electron Devices, CDE'09