Ingeniería eléctrica, electrónica y telecomunicaciones
Disciplina temàtica
Laboratory for Analysis and Architecture of Systems
Tolosa, FranciaPublicacions en col·laboració amb investigadors/es de Laboratory for Analysis and Architecture of Systems (3)
2014
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Kinetic Monte Carlo simulations of boron activation in implanted Si under laser thermal annealing
Applied Physics Express, Vol. 7, Núm. 2
2013
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Dopant dynamics and defects evolution in implanted silicon under laser irradiations: A coupled continuum and kinetic Monte Carlo approach
International Conference on Simulation of Semiconductor Processes and Devices, SISPAD
2005
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E-MRS 2005/Symposium D: Materials science and device issues for future Si-based technologies
Materials Science and Engineering B: Solid-State Materials for Advanced Technology