Ingénierie électrique, électronique et des télécommunications
Disciplina temática
Laboratory for Analysis and Architecture of Systems
Tolosa, FranciaPublications en collaboration avec des chercheurs de Laboratory for Analysis and Architecture of Systems (3)
2014
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Kinetic Monte Carlo simulations of boron activation in implanted Si under laser thermal annealing
Applied Physics Express, Vol. 7, Núm. 2
2013
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Dopant dynamics and defects evolution in implanted silicon under laser irradiations: A coupled continuum and kinetic Monte Carlo approach
International Conference on Simulation of Semiconductor Processes and Devices, SISPAD
2005
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E-MRS 2005/Symposium D: Materials science and device issues for future Si-based technologies
Materials Science and Engineering B: Solid-State Materials for Advanced Technology