Nucleation site location its influence on the microstructure of solid-phase crystallized SiGe films
- Rodríguez, A.
- Rodríguez, T.
- Olivares, J.
- Sangrador, J.
- Martín, P.
- Martínez, O.
- Jiménez, J.
- Ballesteros, C.
ISSN: 0021-8979
Year of publication: 2001
Volume: 90
Issue: 5
Pages: 2544-2552
Type: Article