Nucleation site location its influence on the microstructure of solid-phase crystallized SiGe films

  1. Rodríguez, A.
  2. Rodríguez, T.
  3. Olivares, J.
  4. Sangrador, J.
  5. Martín, P.
  6. Martínez, O.
  7. Jiménez, J.
  8. Ballesteros, C.
Aldizkaria:
Journal of Applied Physics

ISSN: 0021-8979

Argitalpen urtea: 2001

Alea: 90

Zenbakia: 5

Orrialdeak: 2544-2552

Mota: Artikulua

DOI: 10.1063/1.1389075 GOOGLE SCHOLAR