Atomic layer deposition and properties of HFO 2 -Al 2 O 3 nanolaminates

  1. Kukli, K.
  2. Kemell, M.
  3. Castán, H.
  4. Dueñas, S.
  5. Seemen, H.
  6. Rähn, M.
  7. Link, J.
  8. Stern, R.
  9. Ritala, M.
  10. Leskelä, M.
Journal:
ECS Journal of Solid State Science and Technology

ISSN: 2162-8777,  2162-8769

Year of publication: 2018

Volume: 7

Issue: 9

Pages: P501-P508

Type: Article

DOI: 10.1149/2.0261809JSS GOOGLE SCHOLAR lock_openOpen access editor