Hole trap distribution on 2 MeV electron irradiated high-k dielectrics

  1. Dueñas, S.
  2. Castán, H.
  3. García, H.
  4. Fuentes, L.M.
  5. Bailón, L.
  6. Campabadal, F.
  7. Rafí, J.M.
  8. González, M.B.
  9. Takakura, K.
  10. Tsunoda, I.
  11. Yoneoka, M.
Zeitschrift:
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

ISSN: 2166-2754,  2166-2746

Datum der Publikation: 2015

Ausgabe: 33

Nummer: 3

Art: Artikel

DOI: 10.1116/1.4915617 GOOGLE SCHOLAR