Hole trap distribution on 2 MeV electron irradiated high-k dielectrics

  1. Dueñas, S.
  2. Castán, H.
  3. García, H.
  4. Fuentes, L.M.
  5. Bailón, L.
  6. Campabadal, F.
  7. Rafí, J.M.
  8. González, M.B.
  9. Takakura, K.
  10. Tsunoda, I.
  11. Yoneoka, M.
Aldizkaria:
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

ISSN: 2166-2754,  2166-2746

Argitalpen urtea: 2015

Alea: 33

Zenbakia: 3

Mota: Artikulua

DOI: 10.1116/1.4915617 GOOGLE SCHOLAR