Raman microstructural analysis of silicon-on-insulator formed by high dose oxygen ion implantation: As-implanted structures

1. Macía, J.
2. Martín, E.
3. Pérez-Rodríguez, A.
4. Jiménez, J.
5. Morante, J.R.
6. Aspar, B.
7. Margail, J.