Improved physical models for advanced silicon device processing

1. Pelaz, L.
2. Marqués, L.A.
3. Aboy, M.
4. López, P.
5. Santos, I.

Export

Export

×

MLA

modern-language-association

APA

apa

Chicago

chicago-fullnote-bibliography

Harvard

harvard-cite-them-right

Vancouver

vancouver-author-date

---

RIS BibTex

Export

×

This document cannot be exported because it belongs to another portal.

Full text

lock_openUVADOC externo

DOI: 10.1016/J.MSSP.2016.11.007 GOOGLE SCHOLAR lock_openUVADOC editor