Improved physical models for advanced silicon device processing

  1. Pelaz, L.
  2. Marqués, L.A.
  3. Aboy, M.
  4. López, P.
  5. Santos, I.
Revue:
Materials Science in Semiconductor Processing

ISSN: 1369-8001

Année de publication: 2017

Volumen: 62

Pages: 62-79

Type: Révision

DOI: 10.1016/J.MSSP.2016.11.007 GOOGLE SCHOLAR lock_openUVADOC editor