Improved physical models for advanced silicon device processing

  1. Pelaz, L.
  2. Marqués, L.A.
  3. Aboy, M.
  4. López, P.
  5. Santos, I.
Aldizkaria:
Materials Science in Semiconductor Processing

ISSN: 1369-8001

Argitalpen urtea: 2017

Alea: 62

Orrialdeak: 62-79

Mota: Berrikuspena

DOI: 10.1016/J.MSSP.2016.11.007 GOOGLE SCHOLAR lock_openUVADOC editor