Molecular dynamics simulation of the early stages of self-interstitial clustering in silicon
- Marqués, L.A.
- Aboy, M.
- Ruiz, M.
- Santos, I.
- López, P.
- Pelaz, L.
Journal:
Materials Science in Semiconductor Processing
ISSN: 1369-8001
Year of publication: 2016
Volume: 42
Pages: 235-238
Type: Article