Molecular dynamics simulation of the early stages of self-interstitial clustering in silicon

  1. Marqués, L.A.
  2. Aboy, M.
  3. Ruiz, M.
  4. Santos, I.
  5. López, P.
  6. Pelaz, L.
Revue:
Materials Science in Semiconductor Processing

ISSN: 1369-8001

Année de publication: 2016

Volumen: 42

Pages: 235-238

Type: Article

DOI: 10.1016/J.MSSP.2015.07.020 GOOGLE SCHOLAR lock_openUVADOC editor