Publicacions en què col·labora amb Maria Lourdes Pelaz Montes (16)
2001
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Atomistic modeling of the effects of dose and implant temperature on dopant diffusion and amorphization in Si
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
2000
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Atomistic modeling of complex silicon processing scenarios
Materials Research Society Symposium - Proceedings
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Kinetic Monte Carlo simulations: An accurate bridge between ab initio calculations and standard process experimental data
Materials Science in Semiconductor Processing, Vol. 3, Núm. 1-2, pp. 59-63
1999
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Activation and deactivation of implanted B in Si
Applied Physics Letters, Vol. 75, Núm. 5, pp. 662-664
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Atomistic simulations of ion implantation and diffusion
International Conference on Simulation of Semiconductor Processes and Devices, SISPAD
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B cluster formation and dissolution in Si: A scenario based on atomistic modeling
Applied Physics Letters, Vol. 74, Núm. 24, pp. 3657-3659
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Modeling of the effects of dose, dose rate, and implant temperature on transient enhanced diffusion
Applied Physics Letters, Vol. 74, Núm. 14, pp. 2017-2019
1998
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Atomistic modeling of point and extended defects in crystalline materials
Materials Research Society Symposium - Proceedings
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Ion mass influence on transient enhanced diffusion and boron clustering in silicon: Deviation from the "+1" model
Journal of Applied Physics, Vol. 83, Núm. 11, pp. 6182-6184
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Modeling of the ion mass effect on transient enhanced diffusion: Deviation from the "+1" model
Applied Physics Letters, Vol. 73, Núm. 10, pp. 1421-1423
1997
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Atomistic model of transient enhanced diffusion and clustering of boron in silicon
Materials Research Society Symposium - Proceedings
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B diffusion and clustering in ion implanted Si: The role of B cluster precursors
Applied Physics Letters, Vol. 70, Núm. 17, pp. 2285-2287
1996
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Molecular dynamics study of the fluence dependence of Si sputtering by 1 keV Ar+ ions
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 112, Núm. 1-4, pp. 156-159
1995
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Detailed computer simulation of ion implantation processes into crystals
Materials Science and Technology (United Kingdom), Vol. 11, Núm. 11, pp. 1191-1193
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Low energy ion implantation simulation using a modified binary collision approximation code
Nuclear Inst. and Methods in Physics Research, B, Vol. 102, Núm. 1-4, pp. 228-231
1994
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On the forward conduction mechanisms in SiC P-N junctions
Materials Research Society Symposium - Proceedings