Miguel Angel
Gonzalez Rebollo
Nokia Foundation
Espoo, FinlandiaPublications en collaboration avec des chercheurs de Nokia Foundation (2)
2006
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InP surface properties under ICP plasma etching using mixtures of chlorides and hydrides
Materials Science in Semiconductor Processing, Vol. 9, Núm. 1-3, pp. 225-229
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InP surface properties under ICP plasma etching using mixtures of chlorides and hydrides
Conference Proceedings - International Conference on Indium Phosphide and Related Materials