Electrical characterization of high-pressure reactive sputtered Sc 2O3 films on silicon

  1. Castán, H.
  2. Dueñas, S.
  3. Gómez, A.
  4. García, H.
  5. Bailón, L.
  6. Feijoo, P.C.
  7. Toledano-Luque, M.
  8. Del Prado, A.
  9. San Andrés, E.
  10. Lucía, M.L.
Proceedings:
ECS Transactions

ISSN: 1938-5862,  1938-6737

ISBN: 9781566777919

Year of publication: 2010

Volume: 28

Issue: 1

Pages: 287-297

Type: Conference paper

DOI: 10.1149/1.3375614 GOOGLE SCHOLAR