Irradiation effect on dielectric properties of hafnium and gadolinium oxide gate dielectrics

  1. García, H.
  2. Dueñas, S.
  3. Castán, H.
  4. Gómez, A.
  5. Bailón, L.
  6. Barquero, R.
  7. Kukli, K.
  8. Ritala, M.
  9. Leskelä, M.
Aldizkaria:
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

ISSN: 1071-1023

Argitalpen urtea: 2009

Alea: 27

Zenbakia: 1

Orrialdeak: 416-420

Mota: Artikulua

DOI: 10.1116/1.3021040 GOOGLE SCHOLAR