Analysis of the crystallization kinetics and microstructure of polycrystalline SiGe films by optical techniques
- Olivares, J.
- Martín, P.
- Rodríguez, A.
- Sangrador, J.
- Martínez, O.
- Jiménez, J.
- Rodriguez, T.
Proceedings:
Materials Research Society Symposium - Proceedings
ISSN: 0272-9172
Year of publication: 2000
Volume: 588
Pages: 221-226
Type: Conference paper