Analysis of the crystallization kinetics and microstructure of polycrystalline SiGe films by optical techniques

  1. Olivares, J.
  2. Martín, P.
  3. Rodríguez, A.
  4. Sangrador, J.
  5. Martínez, O.
  6. Jiménez, J.
  7. Rodriguez, T.
Actes de conférence:
Materials Research Society Symposium - Proceedings

ISSN: 0272-9172

Année de publication: 2000

Volumen: 588

Pages: 221-226

Type: Communication dans un congrès

GOOGLE SCHOLAR