Analysis of the crystallization kinetics and microstructure of polycrystalline SiGe films by optical techniques

  1. Olivares, J.
  2. Martín, P.
  3. Rodríguez, A.
  4. Sangrador, J.
  5. Martínez, O.
  6. Jiménez, J.
  7. Rodriguez, T.
Aktak:
Materials Research Society Symposium - Proceedings

ISSN: 0272-9172

Argitalpen urtea: 2000

Alea: 588

Orrialdeak: 221-226

Mota: Biltzar ekarpena

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