The role of silicon interstitials in the deactivation and reactivation of high concentration boron profiles

  1. Aboy, M.
  2. Pelaz, L.
  3. Marqués, L.A.
  4. Löpez, P.
  5. Barbolla, J.
  6. Venezia, V.C.
  7. Duffy, R.
  8. Griffin, P.B.
Journal:
Materials Science and Engineering B: Solid-State Materials for Advanced Technology

ISSN: 0921-5107

Year of publication: 2004

Volume: 114-115

Issue: SPEC. ISS.

Pages: 193-197

Type: Conference paper

DOI: 10.1016/J.MSEB.2004.07.056 GOOGLE SCHOLAR