Ion-beam-induced amorphization and recrystallization in silicon
- Pelaz, L.
- Marqús, L.A.
- Barbolla, J.
ISSN: 0021-8979
Year of publication: 2004
Volume: 96
Issue: 11
Pages: 5947-5976
Type: Article
ISSN: 0021-8979
Year of publication: 2004
Volume: 96
Issue: 11
Pages: 5947-5976
Type: Article