Ion-beam-induced amorphization and recrystallization in silicon
- Pelaz, L.
- Marqús, L.A.
- Barbolla, J.
ISSN: 0021-8979
Année de publication: 2004
Volumen: 96
Número: 11
Pages: 5947-5976
Type: Article
Revue:
Journal of Applied Physics