Codiffusion of phosphorus and carbon in preamorphized ultrashallow junctions

  1. Ling, Y.T.
  2. Huang, M.J.
  3. Chang, R.D.
  4. Pelaz, L.
Journal:
Electrochemical and Solid-State Letters

ISSN: 1099-0062

Year of publication: 2012

Volume: 15

Issue: 6

Type: Article

DOI: 10.1149/2.017206ESL GOOGLE SCHOLAR