Codiffusion of phosphorus and carbon in preamorphized ultrashallow junctions
- Ling, Y.T.
- Huang, M.J.
- Chang, R.D.
- Pelaz, L.
Revue:
Electrochemical and Solid-State Letters
ISSN: 1099-0062
Année de publication: 2012
Volumen: 15
Número: 6
Type: Article