Influence of growth and annealing temperatures on the electrical properties of Nb2O5-based MIM capacitors

  1. García, H.
  2. Castán, H.
  3. Perez, E.
  4. Dueñas, S.
  5. Bailón, L.
  6. Blanquart, T.
  7. Niinistö, J.
  8. Kukli, K.
  9. Ritala, M.
  10. Leskelä, M.
Journal:
Semiconductor Science and Technology

ISSN: 0268-1242,  1361-6641

Year of publication: 2013

Volume: 28

Issue: 5

Type: Article

DOI: 10.1088/0268-1242/28/5/055005 GOOGLE SCHOLAR