Influence of growth and annealing temperatures on the electrical properties of Nb2O5-based MIM capacitors

  1. García, H.
  2. Castán, H.
  3. Perez, E.
  4. Dueñas, S.
  5. Bailón, L.
  6. Blanquart, T.
  7. Niinistö, J.
  8. Kukli, K.
  9. Ritala, M.
  10. Leskelä, M.
Aldizkaria:
Semiconductor Science and Technology

ISSN: 0268-1242,  1361-6641

Argitalpen urtea: 2013

Alea: 28

Zenbakia: 5

Mota: Artikulua

DOI: 10.1088/0268-1242/28/5/055005 GOOGLE SCHOLAR