Properties of atomic layer deposited nanolaminates of zirconium and cobalt oxides

  1. Seemen, H.
  2. Rähn, M.
  3. Kalam, K.
  4. Sajavaara, T.
  5. Dueñas, S.
  6. Castán, H.
  7. Link, J.
  8. Stern, R.
  9. Kukli, K.
  10. Tamm, A.
Journal:
ECS Journal of Solid State Science and Technology

ISSN: 2162-8777,  2162-8769

Year of publication: 2018

Volume: 7

Issue: 8

Pages: P402-P409

Type: Article

DOI: 10.1149/2.0191808JSS GOOGLE SCHOLAR lock_openOpen access editor