Characterization of thick conducting molybdenum films: Enhanced conductivity via thermal annealing
- Marcelli, A.
- Spataro, B.
- Sarti, S.
- Dolgashev, V.A.
- Tantawi, S.
- Yeremian, D.A.
- Higashi, Y.
- Parodi, R.
- Notargiacomo, A.
- Xu, J.
- Cappuccio, G.
- Gatti, G.
- Cibin, G.
Journal:
Surface and Coatings Technology
ISSN: 0257-8972
Year of publication: 2015
Volume: 261
Pages: 391-397
Type: Article