Miguel Angel
Gonzalez Rebollo
Nokia Foundation
Espoo, FinlandiaPublicaciones en colaboración con investigadores/as de Nokia Foundation (2)
2006
-
InP surface properties under ICP plasma etching using mixtures of chlorides and hydrides
Materials Science in Semiconductor Processing, Vol. 9, Núm. 1-3, pp. 225-229
-
InP surface properties under ICP plasma etching using mixtures of chlorides and hydrides
Conference Proceedings - International Conference on Indium Phosphide and Related Materials