Electrical characterization of high-k based MIS capacitors using flat-band voltage transients

  1. García, H.
  2. Dueñas, S.
  3. Castán, H.
  4. Gómez, A.
  5. Bailón, L.
  6. Kukli, K.
  7. Hatanpää, T.
  8. Aarik, J.
  9. Aidla, A.
  10. Ritala, M.
  11. Leskelä, M.
Proceedings:
Proceedings of the 2009 Spanish Conference on Electron Devices, CDE'09

ISBN: 9781424428397

Year of publication: 2009

Pages: 223-226

Type: Conference paper

DOI: 10.1109/SCED.2009.4800471 GOOGLE SCHOLAR