Electrical characterization of high-k based MIS capacitors using flat-band voltage transients

  1. García, H.
  2. Dueñas, S.
  3. Castán, H.
  4. Gómez, A.
  5. Bailón, L.
  6. Kukli, K.
  7. Hatanpää, T.
  8. Aarik, J.
  9. Aidla, A.
  10. Ritala, M.
  11. Leskelä, M.
Aktak:
Proceedings of the 2009 Spanish Conference on Electron Devices, CDE'09

ISBN: 9781424428397

Argitalpen urtea: 2009

Orrialdeak: 223-226

Mota: Biltzar ekarpena

DOI: 10.1109/SCED.2009.4800471 GOOGLE SCHOLAR