Electrical characterization of high-k based MIS capacitors using flat-band voltage transients

  1. García, H.
  2. Dueñas, S.
  3. Castán, H.
  4. Gómez, A.
  5. Bailón, L.
  6. Kukli, K.
  7. Hatanpää, T.
  8. Aarik, J.
  9. Aidla, A.
  10. Ritala, M.
  11. Leskelä, M.
Actes de conférence:
Proceedings of the 2009 Spanish Conference on Electron Devices, CDE'09

ISBN: 9781424428397

Année de publication: 2009

Pages: 223-226

Type: Communication dans un congrès

DOI: 10.1109/SCED.2009.4800471 GOOGLE SCHOLAR