Physical modeling and implementation scheme of native defect diffusion and interdiffusion in SiGe heterostructures for atomistic process simulation
- Castrillo, P.
- Pinacho, R.
- Jaraiz, M.
- Rubio, J.E.
ISSN: 0021-8979
Année de publication: 2011
Volumen: 109
Número: 10
Type: Communication dans un congrès