Conduction and stability of holmium titanium oxide thin films grown by atomic layer deposition

  1. Castán, H.
  2. García, H.
  3. Dueñas, S.
  4. Bailón, L.
  5. Miranda, E.
  6. Kukli, K.
  7. Kemell, M.
  8. Ritala, M.
  9. Leskelä, M.
Journal:
Thin Solid Films

ISSN: 0040-6090

Year of publication: 2015

Volume: 591

Pages: 55-59

Type: Article

DOI: 10.1016/J.TSF.2015.08.027 GOOGLE SCHOLAR