Conduction and stability of holmium titanium oxide thin films grown by atomic layer deposition

  1. Castán, H.
  2. García, H.
  3. Dueñas, S.
  4. Bailón, L.
  5. Miranda, E.
  6. Kukli, K.
  7. Kemell, M.
  8. Ritala, M.
  9. Leskelä, M.
Revue:
Thin Solid Films

ISSN: 0040-6090

Année de publication: 2015

Volumen: 591

Pages: 55-59

Type: Article

DOI: 10.1016/J.TSF.2015.08.027 GOOGLE SCHOLAR