Structure and Electrical Behavior of Hafnium-Praseodymium Oxide Thin Films Grown by Atomic Layer Deposition

  1. Kukli, K.
  2. Aarik, L.
  3. Vinuesa, G.
  4. Dueñas, S.
  5. Castán, H.
  6. García, H.
  7. Kasikov, A.
  8. Ritslaid, P.
  9. Piirsoo, H.-M.
  10. Aarik, J.
Aldizkaria:
Materials

ISSN: 1996-1944

Argitalpen urtea: 2022

Alea: 15

Zenbakia: 3

Mota: Artikulua

DOI: 10.3390/MA15030877 GOOGLE SCHOLAR lock_openSarbide irekia editor