Conductance transient, capacitance-voltage and deep-level transient spectroscopy characterization of atomic layer deposited hafnium and zirconium oxide thin films
- Dueñas, S.
- Castán, H.
- Barbolla, J.
- Kukli, K.
- Ritala, M.
- Leskelä, M.
ISSN: 0038-1101
Year of publication: 2003
Volume: 47
Issue: 10
Pages: 1623-1629
Type: Conference paper