Conductance transient, capacitance-voltage and deep-level transient spectroscopy characterization of atomic layer deposited hafnium and zirconium oxide thin films

  1. Dueñas, S.
  2. Castán, H.
  3. Barbolla, J.
  4. Kukli, K.
  5. Ritala, M.
  6. Leskelä, M.
Aldizkaria:
Solid-State Electronics

ISSN: 0038-1101

Argitalpen urtea: 2003

Alea: 47

Zenbakia: 10

Orrialdeak: 1623-1629

Mota: Biltzar ekarpena

DOI: 10.1016/S0038-1101(03)00172-2 GOOGLE SCHOLAR